Seattle, WA, USA--(Jobwerx News)--The GE technology team in Kobe, Japan, to offer custom wafer heater assemblies for semiconductor equipment manufacturers.

Multi-Zone Center Shaft Heater Assembly - New multi-zone center shaft heater assembly featuring a pyrolytic boron nitride (PBN) heater sealed with GE 124 quartz ingot material. A two-zone example is shown, but the assembly is capable of five or more independent zones. Click on photo for High Resolution image.

To help optimize the performance of heaters and electrostatic chucks in chip-making equipment, GE's Quartz business announced an integrated heater assembly platform based at the company's new laboratory in Kobe, Japan. These custom assemblies - a critical subsystem of semiconductor equipment manufacturers' wafer chambers - combine customer-specific mechanical, electrical, and thermal engineering with GE's advanced chemical vapor deposited (CVD) ceramic heaters and e-chucks. By considering thermal, plasma, mechanical, and electrical boundary conditions of the OEM's chamber, GE's new integrated design process helps optimize the performance of the entire system.

High-Ramp Heater Assembly - High-ramp heater assembly is capable of temperature ramp rates exceeding 10 C/second and maximum temperatures up to 1,300 C. Click on photo for High Resolution image.

According to Chris Intihar, GE product manager, Wafer Processing, “GE has designed a new heater assembly platform with the customer's needs in mind. GE's Quartz business is the only known supplier to provide forward integration that will help semiconductor equipment firms improve the performance of the entire wafer chamber, while helping to maximize their internal engineering resources. Our Kobe lab offers sophisticated design and testing capabilities and a dedicated technology team to help customers expedite their projects. To accelerate this iterative design process, we are leveraging our ceramics materials expertise from GE's Global Research Center in Niskayuna, N.Y., and our advanced predictive engineering and modeling capabilities from our team at GE's John F. Welch Technology Center in Bangalore, India. Our U.S. plant at our Strongsville, Ohio, world headquarters and our Japan plant near Himeji City, also play an integral part of the design and manufacturing process.”

The GE technology team at Kobe will deliver complete heater assemblies featuring custom heaters, e-chucks, and its industry-standard quartz materials. GE heaters and e-chucks are mechanically and thermally more robust than sintered ceramic alternatives. They enable temperature ramp rates exceeding 10 C/second with maximum temperatures up to 1,300 C, and precise temperature control, generally within +/- 1 percent. These material performance advantages translate into increased throughput, greater process flexibility, and improved wafer yields for semiconductor equipment OEMs.

Top GE executives attended the ribbon cutting ceremony for the grand opening of GE's new Kobe lab. From left to right here are Akira Tokunaga - Asia sales leader, GE's Quartz business; Jeff Davis - vice president Sales, GE's Quartz business; Maryrose Sylvester - president and CEO, GE's Quartz business; Nobuhiko Ito - president and CEO, GE Japan; and Koji Kiyota - Heater Assembly Platform team leader, GE's Quartz business. Click on photo for High Resolution image.

The Kobe facility, located in the Kobe International Business Center, is equipped with a Class 1000 (measured at 0.3 micron particulate level) or Class 100 (measured at 0.5 micron particulate level) clean room, thermal modeling capability, two test chambers capable of generating plasma and measuring electrostatic clamping force, multiple heater power supplies, and infrared cameras.

GE's Quartz business is a world leader in the development and manufacture of fused quartz materials and products for the semi-conductor, fiber optic, and lighting industries. The business is also a leading global supplier of advanced ceramics, boron nitride and titanium diboride powders, hot-pressed boron nitride and composite shapes, boron nitride coatings, and pyrolytic boron nitride and graphite products for use in semiconductor, electronic materials, personal care, materials processing, and other advanced technology applications.

The new lab in Kobe, Japan was officially opened on July 1, 2005.

Click here to view more news articles