Lithography technologies have evolved rapidly, as narrower circuit
exposure has become necessary to create high-density devices.
Technology that Can Perform a Portion of Semiconductor Manufacturing
Lithography technology is key to the manufacturing of semiconductors,
and today it must produce finer electronic circuitry to keep apace of
the increasing integration of semiconductors. To print an electronic
circuit pattern on a silicon wafer, the pattern on the original reticle
plate of the electronic circuit is shrunk, and then exposed on a wafer
coated with a photoresist (sensitized material). Developing the exposure
forms a resist pattern, which is then ready for the etching and doping
processes. Repeating this process upward of 20 times creates countless
elements, such as transistors and diodes that are used in the various
highly integrated semiconductor chips in central processing units (CPUs)
and other memory devices. Technology plays a huge role in the semiconductor
exposure system in this manufacturing process.
Canon (www.canon.com) adopted an excimer laser lithography device for
the production of 256 MB DRAMs. We offer a stepper that exposes line-widths
of down to 150 nm and a scanning stepper featuring line-widths down
to 100 nm.
Our current steppers use krypton fluoride (KrF) excimer lasers, with
a wavelength of 248 nm, and argon fluoride (ArF) excimer lasers with
a wavelength of 193 nm. But F2 lasers will be used in realizing shorter
wavelengths for next-generation steppers with a wavelength of 157 nm.
To achieve even higher resolutions, we are also researching lithography
devices using EUV (extreme ultraviolet) as the light source.
EUV stepper technology, the latest generation in lithography technology,
is based on 50 nm design rules. It is expected to advance miniaturization
across a number of generations over 35 nm.
Cannon in the Americas (www.canon.com)
Canon Group sales in the Americas reached approximately US$8,418 million
in 2002, with 10,151 employees in the region. Canon U.S.A., Inc., the
Group's headquarters in the Americas, is currently strengthening its
R&D functions while integrating regional operations from development
to production. Canon Development Americas, Inc., is responsible for
a wide range of activities and is developing leading-edge technologies
and products. Another key Group player is Canon Virginia, Inc., which
has a production system enabling quick and flexible responses to local
market needs.
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